Introduction Within ASML Research Metrology department, the Computational Methods for Metrology and Sensors(CMMS) group develops physics‑based simulations to model, study and assess metrology sensors in their application and inference methods that convert raw metrology sensor signals into manufacturing‑critical parameters.
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Introduction Within ASML Research Metrology department, the Computational Methods for Metrology and Sensors(CMMS) group develops physics‑based simulations to model, study and assess metrology sensors in their application and inference methods that convert raw metrology sensor signals into manufacturing‑critical parameters.