Introduction The Wafer Metrology group is part of ASML’s Development & Engineering organization, within the Performance & Integration cluster. The group is responsible for developing a robust metrology ecosystem that enables accurate performance assessment and optimization
Introduction ASML derives machine performance and availability information from machine-generated data using a standardized State Model, aligned with the SEMIE‑10 standard. The reconciled states are used for reporting, performance metrics, and contractual purposes. While the automated